Fatt C, Bakar N, Johari N, Haron M, Desa N, Hashim U. Design and Fabrication of n-ISFET using Si3N4 as a Sensing Membrane for pH Measurement. JET [Internet]. 2011Jun.30 [cited 2024Dec.4];2:23-30. Available from: https://jet.utem.edu.my/jet/article/view/177